Issued Patents 2016
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9472457 | Manganese oxide hard mask for etching dielectric materials | Wei Lin, Tuan A. Vo | 2016-10-18 |
| 9472710 | Low-loss large-grain optical waveguide for interconnecting components integrated on a glass substrate | Stephen M. Gates, Joyeeta Nag, Jason S. Orcutt, Jean-Olivier Plouchart | 2016-10-18 |
| 9466538 | Method to achieve ultra-high chip-to-chip alignment accuracy for wafer-to-wafer bonding process | Subramanian S. Iyer, Donald F. Canaperi, Shidong Li, Wei Lin | 2016-10-11 |
| 9401303 | Handler wafer removal by use of sacrificial inert layer | Kangguo Cheng, Jonathan E. Faltermeier, Mukta G. Farooq, Wei Lin, Kevin R. Winstel | 2016-07-26 |
| 9378966 | Selective etching of silicon wafer | Brown C. Peethala, Da Song, Allan Upham, Kevin R. Winstel | 2016-06-28 |
| 9263366 | Liquid cooling of semiconductor chips utilizing small scale structures | Wei Lin, Son V. Nguyen, Tuan A. Vo | 2016-02-16 |