Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9508560 | SiARC removal with plasma etch and fluorinated wet chemical solution combination | Yann Mignot, Shariq Siddiqui | 2016-11-29 |
| 9390967 | Method for residue-free block pattern transfer onto metal interconnects for air gap formation | Joe Lee, Yann Mignot | 2016-07-12 |
| 9378966 | Selective etching of silicon wafer | Spyridon Skordas, Da Song, Allan Upham, Kevin R. Winstel | 2016-06-28 |
| 9373543 | Forming interconnect features with reduced sidewall tapering | Frank W. Mont, Shariq Siddiqui, Douglas M. Trickett | 2016-06-21 |
| 9349687 | Advanced manganese/manganese nitride cap/etch mask for air gap formation scheme in nanocopper low-K interconnect | Stephen M. Gates, Elbert E. Huang, Joe Lee, Son V. Nguyen, Christopher J. Penny +1 more | 2016-05-24 |