| 9472503 |
Ultrathin superlattice of MnO/Mn/MnN and other metal oxide/metal/metal nitride liners and caps for copper low dielectric constant interconnects |
Donald F. Canaperi, Daniel C. Edelstein, Alfred Grill, Son V. Nguyen, Takeshi Nogami +1 more |
2016-10-18 |
| 9455182 |
Interconnect structure with capping layer and barrier layer |
Daniel C. Edelstein, Son V. Nguyen, Takeshi Nogami, Hosadurga Shobha |
2016-09-27 |
| 9449812 |
Hydrogen-free silicon-based deposited dielectric films for nano device fabrication |
Donald F. Canaperi, Alfred Grill, Sanjay C. Mehta, Son V. Nguyen, Hosadurga Shobha +1 more |
2016-09-20 |
| 9449810 |
Advanced ultra low k SiCOH dielectrics prepared by built-in engineered pore size and bonding structured with cyclic organosilicon precursors |
Donald F. Canaperi, Son V. Nguyen, Hosadurga Shobha |
2016-09-20 |
| 9435031 |
Microwave plasma and ultraviolet assisted deposition apparatus and method for material deposition using the same |
Alfred Grill, Son V. Nguyen |
2016-09-06 |
| 9431235 |
Multilayer dielectric structures with graded composition for nano-scale semiconductor devices |
Son V. Nguyen |
2016-08-30 |
| 9412629 |
Wafer bonding for 3D device packaging fabrication |
Son V. Nguyen, Vamsi K. Paruchuri, Tuan A. Vo |
2016-08-09 |
| 9349687 |
Advanced manganese/manganese nitride cap/etch mask for air gap formation scheme in nanocopper low-K interconnect |
Stephen M. Gates, Elbert E. Huang, Joe Lee, Son V. Nguyen, Brown C. Peethala +1 more |
2016-05-24 |
| 9312224 |
Interconnect structure containing a porous low k interconnect dielectric/dielectric cap |
Donald F. Canaperi, Alfred Grill, Thomas J. Haigh, Jr., Son V. Nguyen, Takeshi Nogami +2 more |
2016-04-12 |
| 9305836 |
Air gap semiconductor structure with selective cap bilayer |
Stephen M. Gates, Elbert E. Huang, Dimitri Kioussis, Christopher J. Penny |
2016-04-05 |
| 9275952 |
Ultrathin superlattice of MnO/Mn/MnN and other metal oxide/metal/metal nitride liners and caps for copper low dielectric constant interconnects |
Donald F. Canaperi, Daniel C. Edelstein, Alfred Grill, Son V. Nguyen, Takeshi Nogami +1 more |
2016-03-01 |
