Issued Patents 2016
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9516428 | MEMS acoustic transducer, MEMS microphone, MEMS microspeaker, array of speakers and method for manufacturing an acoustic transducer | Guenther Ruhl | 2016-12-06 |
| 9513261 | Photoacoustic gas sensor device and a method for analyzing gas | Stefan Kolb, Horst Theuss | 2016-12-06 |
| 9510107 | Double diaphragm MEMS microphone without a backplate element | Marina Fekry Megally Bastarous | 2016-11-29 |
| 9494477 | Dynamic pressure sensor | Andreas Wiesbauer | 2016-11-15 |
| 9487386 | Comb MEMS device and method of making a comb MEMS device | — | 2016-11-08 |
| 9458009 | Semiconductor devices and methods of forming thereof | Carsten Ahrens, Stefan Barzen, Wolfgang Friza | 2016-10-04 |
| 9448126 | Single diaphragm transducer structure | Christoph Glacer | 2016-09-20 |
| 9438979 | MEMS sensor structure for sensing pressure waves and a change in ambient pressure | — | 2016-09-06 |
| 9409763 | MEMS device and method of making a MEMS device | Martin Wurzer, Christian Herzum | 2016-08-09 |
| 9402138 | MEMS device and method of manufacturing a MEMS device | Stephan Pindl, Bernhard Knott, Carsten Ahrens | 2016-07-26 |
| 9402137 | Sound transducer with interdigitated first and second sets of comb fingers | Shu-Ting Hsu | 2016-07-26 |
| 9362853 | Plate, transducer and methods for making and operating a transducer | — | 2016-06-07 |
| 9309105 | Sensor structure for sensing pressure waves and ambient pressure | Roland Helm | 2016-04-12 |
| 9227843 | Methods of manufacturing a MEMS device having a backplate with elongated protrusions | — | 2016-01-05 |