Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9402138 | MEMS device and method of manufacturing a MEMS device | Alfons Dehe, Stephan Pindl, Carsten Ahrens | 2016-07-26 |
| 9269654 | Semiconductor device and method of manufacture thereof | Stefan Willkofer, Uwe Wahl, Markus Hammer, Andreas Strasser | 2016-02-23 |
| 9236290 | Method for producing a semiconductor device | Carsten Ahrens, Rudolf Berger, Manfred Frank, Uwe Hoeckele, Ulrich Krumbein +4 more | 2016-01-12 |