Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9409763 | MEMS device and method of making a MEMS device | Alfons Dehe, Christian Herzum | 2016-08-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9409763 | MEMS device and method of making a MEMS device | Alfons Dehe, Christian Herzum | 2016-08-09 |