Issued Patents 2011
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8080477 | Film formation apparatus and method for using same | Nobutake Nodera, Jun Sato, Masanobu Matsunaga | 2011-12-20 |
| 8080290 | Film formation method and apparatus for semiconductor process | Nobutake Nodera, Masanobu Matsunaga, Jun Satoh, Pao-Hwa Chou | 2011-12-20 |
| 8034673 | Film formation method and apparatus for forming silicon-containing insulating film doped with metal | Kentaro Kadonaga, Yamato Tonegawa, Pao-Hwa Chou, Tetsuya Shibata | 2011-10-11 |
| 8025931 | Film formation apparatus for semiconductor process and method for using the same | Pao-Hwa Chou | 2011-09-27 |
| 8021987 | Method of modifying insulating film | Takuya Sugawara, Yoshihide Tada, Genji Nakamura, Shigenori Ozaki, Toshio Nakanishi +4 more | 2011-09-20 |
| 7993705 | Film formation apparatus and method for using the same | Nobutake Nodera, Kazuya Yamamoto | 2011-08-09 |
| 7989354 | Patterning method | Shigeru Nakajima, Pao-Hwa Chou, Mitsuaki Iwashita, Reiji Niino | 2011-08-02 |
| 7964241 | Film formation method and apparatus for semiconductor process | Pao-Hwa Chou, Kota Umezawa, Kentaro Kadonaga, Hao-Hsiang Chang | 2011-06-21 |
| 7959733 | Film formation apparatus and method for semiconductor process | Pao-Hwa Chou, Chaeho Kim | 2011-06-14 |
| 7923378 | Film formation method and apparatus for forming silicon-containing insulating film | Shigeru Nakajima, Jun Ogawa | 2011-04-12 |
| 7906168 | Film formation method and apparatus for forming silicon oxide film | Yoshihiro Ishida, Takehiko Fujita, Jun Ogawa, Shigeru Nakajima | 2011-03-15 |