Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8034673 | Film formation method and apparatus for forming silicon-containing insulating film doped with metal | Yamato Tonegawa, Pao-Hwa Chou, Kazuhide Hasebe, Tetsuya Shibata | 2011-10-11 |
| 7964241 | Film formation method and apparatus for semiconductor process | Kazuhide Hasebe, Pao-Hwa Chou, Kota Umezawa, Hao-Hsiang Chang | 2011-06-21 |