Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8080109 | Film formation apparatus and method for using the same | Mitsuhiro Okada, Satoshi Takagi, Ryou Son, Masahiko Tomita, Toshiharu Nishimura | 2011-12-20 |
| 8034673 | Film formation method and apparatus for forming silicon-containing insulating film doped with metal | Kentaro Kadonaga, Pao-Hwa Chou, Kazuhide Hasebe, Tetsuya Shibata | 2011-10-11 |
| 7964516 | Film formation apparatus for semiconductor process and method for using same | Mitsuhiro Okada | 2011-06-21 |
| 7959737 | Film formation apparatus and method for using the same | Mitsuhiro Okada, Satoshi MIZUNAGA, Toshiharu Nishimura | 2011-06-14 |
| 7938080 | Method for using film formation apparatus | Naotaka Noro, Takehiko Fujita, Norifumi Kimura | 2011-05-10 |