Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8080109 | Film formation apparatus and method for using the same | Mitsuhiro Okada, Satoshi Takagi, Ryou Son, Yamato Tonegawa, Toshiharu Nishimura | 2011-12-20 |
| 7981809 | Film formation method and apparatus for semiconductor process | Tetsuya Shibata, Yutaka Takahashi, Kota Umezawa | 2011-07-19 |