ST

Satoshi Takagi

TL Tokyo Electron Limited: 1 patents #261 of 712Top 40%
Overall (2011): #172,917 of 364,097Top 50%
1
Patents 2011

Issued Patents 2011

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
8080109 Film formation apparatus and method for using the same Mitsuhiro Okada, Ryou Son, Masahiko Tomita, Yamato Tonegawa, Toshiharu Nishimura 2011-12-20