Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8080109 | Film formation apparatus and method for using the same | Satoshi Takagi, Ryou Son, Masahiko Tomita, Yamato Tonegawa, Toshiharu Nishimura | 2011-12-20 |
| 7964516 | Film formation apparatus for semiconductor process and method for using same | Yamato Tonegawa | 2011-06-21 |
| 7959737 | Film formation apparatus and method for using the same | Satoshi MIZUNAGA, Yamato Tonegawa, Toshiharu Nishimura | 2011-06-14 |
| 7923357 | Method for forming poly-silicon film | Takahiro Miyahara, Toshiharu Nishimura | 2011-04-12 |