Issued Patents 2011
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8080290 | Film formation method and apparatus for semiconductor process | Kazuhide Hasebe, Nobutake Nodera, Masanobu Matsunaga, Jun Satoh | 2011-12-20 |
| 8034673 | Film formation method and apparatus for forming silicon-containing insulating film doped with metal | Kentaro Kadonaga, Yamato Tonegawa, Kazuhide Hasebe, Tetsuya Shibata | 2011-10-11 |
| 8025931 | Film formation apparatus for semiconductor process and method for using the same | Kazuhide Hasebe | 2011-09-27 |
| 7989354 | Patterning method | Shigeru Nakajima, Kazuhide Hasebe, Mitsuaki Iwashita, Reiji Niino | 2011-08-02 |
| 7964241 | Film formation method and apparatus for semiconductor process | Kazuhide Hasebe, Kota Umezawa, Kentaro Kadonaga, Hao-Hsiang Chang | 2011-06-21 |
| 7959733 | Film formation apparatus and method for semiconductor process | Kazuhide Hasebe, Chaeho Kim | 2011-06-14 |