Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8080290 | Film formation method and apparatus for semiconductor process | Kazuhide Hasebe, Nobutake Nodera, Jun Satoh, Pao-Hwa Chou | 2011-12-20 |
| 8080477 | Film formation apparatus and method for using same | Nobutake Nodera, Jun Sato, Kazuhide Hasebe | 2011-12-20 |