Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8080290 | Film formation method and apparatus for semiconductor process | Kazuhide Hasebe, Masanobu Matsunaga, Jun Satoh, Pao-Hwa Chou | 2011-12-20 |
| 8080477 | Film formation apparatus and method for using same | Jun Sato, Masanobu Matsunaga, Kazuhide Hasebe | 2011-12-20 |
| 7993705 | Film formation apparatus and method for using the same | Kazuhide Hasebe, Kazuya Yamamoto | 2011-08-09 |