JS

Jun Satoh

TL Tokyo Electron Limited: 1 patents #261 of 712Top 40%
Overall (2011): #253,452 of 364,097Top 70%
1
Patents 2011

Issued Patents 2011

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
8080290 Film formation method and apparatus for semiconductor process Kazuhide Hasebe, Nobutake Nodera, Masanobu Matsunaga, Pao-Hwa Chou 2011-12-20