Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8062955 | Substrate processing method and substrate processing apparatus | Takashi Tanaka, Kenichi Hara | 2011-11-22 |
| 8003509 | Semiconductor manufacturing apparatus and semiconductor manufacturing method | Kenichi Hara, Takashi Tanaka, Takayuki Toshima, Takehiko Orii | 2011-08-23 |
| 7989354 | Patterning method | Shigeru Nakajima, Kazuhide Hasebe, Pao-Hwa Chou, Reiji Niino | 2011-08-02 |