Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8062955 | Substrate processing method and substrate processing apparatus | Takashi Tanaka, Mitsuaki Iwashita | 2011-11-22 |
| 8003509 | Semiconductor manufacturing apparatus and semiconductor manufacturing method | Mitsuaki Iwashita, Takashi Tanaka, Takayuki Toshima, Takehiko Orii | 2011-08-23 |