Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8003509 | Semiconductor manufacturing apparatus and semiconductor manufacturing method | Kenichi Hara, Mitsuaki Iwashita, Takashi Tanaka, Takayuki Toshima | 2011-08-23 |
| 7927429 | Substrate cleaning method, substrate cleaning apparatus and computer readable recording medium | Hiromitsu Nanba, Takashi Yabuta | 2011-04-19 |
| 7862680 | Substrate processing apparatus | Tatsuya Nishida, Osamu Kuroda | 2011-01-04 |