Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8051862 | Liquid processing apparatus and liquid processing method | Norihiro Ito, Satoshi Kaneko | 2011-11-08 |
| 8043440 | Cleaning apparatus and method and computer readable medium | Norihiro Ito | 2011-10-25 |
| 8043467 | Liquid processing apparatus and liquid processing method | Masahiro Yoshida, Yuji Murakami, Hiroshi Nagayasu | 2011-10-25 |
| 7998308 | Liquid processing apparatus | Satoshi Kaneko, Kazuhisa Matsumoto, Norihiro Ito, Masami Akimoto, Takayuki Toshima | 2011-08-16 |
| 7927429 | Substrate cleaning method, substrate cleaning apparatus and computer readable recording medium | Takashi Yabuta, Takehiko Orii | 2011-04-19 |