Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8043467 | Liquid processing apparatus and liquid processing method | Hiromitsu Nanba, Masahiro Yoshida, Yuji Murakami | 2011-10-25 |
| 8037891 | Two-fluid nozzle for cleaning substrate and substrate cleaning apparatus | Itaru Kanno, Yusaku Hirota, Kenji Sekiguchi, Shouichi Shimose | 2011-10-18 |