Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8037891 | Two-fluid nozzle for cleaning substrate and substrate cleaning apparatus | Itaru Kanno, Yusaku Hirota, Kenji Sekiguchi, Hiroshi Nagayasu | 2011-10-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8037891 | Two-fluid nozzle for cleaning substrate and substrate cleaning apparatus | Itaru Kanno, Yusaku Hirota, Kenji Sekiguchi, Hiroshi Nagayasu | 2011-10-18 |