Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8056257 | Substrate processing apparatus and substrate processing method | Hiroki Ohno | 2011-11-15 |
| 8037891 | Two-fluid nozzle for cleaning substrate and substrate cleaning apparatus | Itaru Kanno, Yusaku Hirota, Hiroshi Nagayasu, Shouichi Shimose | 2011-10-18 |