Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8037891 | Two-fluid nozzle for cleaning substrate and substrate cleaning apparatus | Itaru Kanno, Kenji Sekiguchi, Hiroshi Nagayasu, Shouichi Shimose | 2011-10-18 |
| 7989283 | Manufacturing method of semiconductor device | Shinichi Yamanari, Ryoichi Yoshifuku, Masaaki Shinohara, Takahiro Maruyama, Kenji Kawai | 2011-08-02 |