Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8015984 | Substrate processing apparatus including a drying mechanism using a fluid mixture of purified water and a volatile organic solvent | Koukichi Hiroshiro, Yuji Kamikawa, Naoki Shindo | 2011-09-13 |
| 8003509 | Semiconductor manufacturing apparatus and semiconductor manufacturing method | Kenichi Hara, Mitsuaki Iwashita, Takashi Tanaka, Takehiko Orii | 2011-08-23 |
| 7998306 | Substrate processing apparatus | Koukichi Hiroshiro, Hideyuki Yamamoto, Kazuhiro Takeshita | 2011-08-16 |
| 7998308 | Liquid processing apparatus | Satoshi Kaneko, Kazuhisa Matsumoto, Norihiro Ito, Masami Akimoto, Hiromitsu Nanba | 2011-08-16 |