Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8015984 | Substrate processing apparatus including a drying mechanism using a fluid mixture of purified water and a volatile organic solvent | Koukichi Hiroshiro, Takayuki Toshima, Naoki Shindo | 2011-09-13 |
| 8002511 | Batch forming apparatus, substrate processing system, batch forming method, and storage medium | Koji Egashira | 2011-08-23 |
| 7972468 | Semiconductor device fabricating system | Masahiro Noda | 2011-07-05 |