Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8083857 | Substrate cleaning method and substrate cleaning apparatus | Tsukasa Watanabe, Kazuyoshi Eshima | 2011-12-27 |
| 8015984 | Substrate processing apparatus including a drying mechanism using a fluid mixture of purified water and a volatile organic solvent | Koukichi Hiroshiro, Yuji Kamikawa, Takayuki Toshima | 2011-09-13 |
| 7896973 | Substrate processing apparatus and substrate processing method | Tadashi Iino | 2011-03-01 |
| 7897498 | Method for manufacturing semiconductor device | Glenn W. Gale, Yoshihiro Hirota, Yusuke Muraki, Genji Nakamura, Masato Kushibiki +3 more | 2011-03-01 |