Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8083857 | Substrate cleaning method and substrate cleaning apparatus | Tsukasa Watanabe, Naoki Shindo | 2011-12-27 |
| 7900640 | Cleaning apparatus including cleaning tank with improved cover | — | 2011-03-08 |