Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8015984 | Substrate processing apparatus including a drying mechanism using a fluid mixture of purified water and a volatile organic solvent | Yuji Kamikawa, Takayuki Toshima, Naoki Shindo | 2011-09-13 |
| 7998306 | Substrate processing apparatus | Hideyuki Yamamoto, Kazuhiro Takeshita, Takayuki Toshima | 2011-08-16 |