Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8021987 | Method of modifying insulating film | Takuya Sugawara, Yoshihide Tada, Genji Nakamura, Shigenori Ozaki, Toshio Nakanishi +4 more | 2011-09-20 |
| 7989354 | Patterning method | Kazuhide Hasebe, Pao-Hwa Chou, Mitsuaki Iwashita, Reiji Niino | 2011-08-02 |
| 7923378 | Film formation method and apparatus for forming silicon-containing insulating film | Kazuhide Hasebe, Jun Ogawa | 2011-04-12 |
| 7906168 | Film formation method and apparatus for forming silicon oxide film | Kazuhide Hasebe, Yoshihiro Ishida, Takehiko Fujita, Jun Ogawa | 2011-03-15 |