Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8067809 | Semiconductor storage device including a gate insulating film with a favorable nitrogen concentration profile and method for manufacturing the same | Junichi Kitagawa, Akinobu Teramoto, Tadahiro Ohmi | 2011-11-29 |
| 8021987 | Method of modifying insulating film | Takuya Sugawara, Yoshihide Tada, Genji Nakamura, Toshio Nakanishi, Masaru Sasaki +4 more | 2011-09-20 |
| 7897518 | Plasma processing method and computer storage medium | Seiji Matsuyama, Toshio Nakanishi, Hikaru Adachi, Koichi Takatsuki, Yoshihiro Sato | 2011-03-01 |
| 7887637 | Method for cleaning treatment chamber in substrate treating apparatus and method for detecting endpoint of cleaning | Hideyuki Noguchi, Yoshiro Kabe, Kazuhiro Isa, Masaru Sasaki | 2011-02-15 |