Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7910495 | Plasma oxidizing method, plasma processing apparatus, and storage medium | Toshihiko Shiozawa, Yoshiro Kabe, Takashi Kobayashi, Junichi Kitagawa, Nobuhiko Yamamoto | 2011-03-22 |
| 7897518 | Plasma processing method and computer storage medium | Seiji Matsuyama, Toshio Nakanishi, Shigenori Ozaki, Koichi Takatsuki, Yoshihiro Sato | 2011-03-01 |