Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7910495 | Plasma oxidizing method, plasma processing apparatus, and storage medium | Toshihiko Shiozawa, Yoshiro Kabe, Takashi Kobayashi, Hikaru Adachi, Junichi Kitagawa | 2011-03-22 |