Issued Patents 2011
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8043979 | Plasma oxidizing method, storage medium, and plasma processing apparatus | Takashi Kobayashi, Junichi Kitagawa, Toshihiko Shiozawa | 2011-10-25 |
| 8034179 | Method for insulating film formation, storage medium from which information is readable with computer, and processing system | Junichi Kitagawa, Kikuo Yamabe | 2011-10-11 |
| 8026187 | Method of forming silicon oxide film and method of production of semiconductor memory device using this method | Junichi Kitagawa, Kikuo Yamabe | 2011-09-27 |
| 8003484 | Method for forming silicon oxide film, plasma processing apparatus and storage medium | Takashi Kobayashi, Toshihiko Shiozawa, Junichi Kitagawa | 2011-08-23 |
| 7989364 | Plasma oxidation processing method | Masaru Hori, Toshihiko Shiozawa, Junichi Kitagawa | 2011-08-02 |
| 7981785 | Method for manufacturing semiconductor device and plasma oxidation method | Masaru Sasaki | 2011-07-19 |
| 7910495 | Plasma oxidizing method, plasma processing apparatus, and storage medium | Toshihiko Shiozawa, Takashi Kobayashi, Hikaru Adachi, Junichi Kitagawa, Nobuhiko Yamamoto | 2011-03-22 |
| 7887637 | Method for cleaning treatment chamber in substrate treating apparatus and method for detecting endpoint of cleaning | Shigenori Ozaki, Hideyuki Noguchi, Kazuhiro Isa, Masaru Sasaki | 2011-02-15 |