Issued Patents 2011
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8021987 | Method of modifying insulating film | Takuya Sugawara, Yoshihide Tada, Genji Nakamura, Shigenori Ozaki, Toshio Nakanishi +4 more | 2011-09-20 |
| 8006640 | Plasma processing apparatus and plasma processing method | — | 2011-08-30 |
| 7981785 | Method for manufacturing semiconductor device and plasma oxidation method | Yoshiro Kabe | 2011-07-19 |
| 7906440 | Semiconductor device manufacturing method and plasma oxidation method | — | 2011-03-15 |
| 7897009 | Plasma processing apparatus | — | 2011-03-01 |
| 7887637 | Method for cleaning treatment chamber in substrate treating apparatus and method for detecting endpoint of cleaning | Shigenori Ozaki, Hideyuki Noguchi, Yoshiro Kabe, Kazuhiro Isa | 2011-02-15 |