Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8021987 | Method of modifying insulating film | Takuya Sugawara, Yoshihide Tada, Genji Nakamura, Shigenori Ozaki, Masaru Sasaki +4 more | 2011-09-20 |
| 7968470 | Plasma nitriding method, method for manufacturing semiconductor device and plasma processing apparatus | Tadahiro Ohmi, Akinobu Teramoto, Minoru Honda | 2011-06-28 |
| 7960293 | Method for forming insulating film and method for manufacturing semiconductor device | Minoru Honda, Yoshihiro Sato | 2011-06-14 |
| 7915177 | Method of forming gate insulation film, semiconductor device, and computer recording medium | Tatsuo Nishita, Shuuichi Ishizuka, Yutaka Fujino, Yoshihiro Sato | 2011-03-29 |
| 7897518 | Plasma processing method and computer storage medium | Seiji Matsuyama, Shigenori Ozaki, Hikaru Adachi, Koichi Takatsuki, Yoshihiro Sato | 2011-03-01 |