Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8021987 | Method of modifying insulating film | Takuya Sugawara, Yoshihide Tada, Genji Nakamura, Shigenori Ozaki, Toshio Nakanishi +4 more | 2011-09-20 |
| 7897518 | Plasma processing method and computer storage medium | Toshio Nakanishi, Shigenori Ozaki, Hikaru Adachi, Koichi Takatsuki, Yoshihiro Sato | 2011-03-01 |
| 7883746 | Insulating film formation method which exhibits improved thickness uniformity and improved composition uniformity | Jun Suzuki, Kenji Yoneda | 2011-02-08 |