Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8076252 | Substrate processing method and substrate processing apparatus | — | 2011-12-13 |
| 7897518 | Plasma processing method and computer storage medium | Seiji Matsuyama, Toshio Nakanishi, Shigenori Ozaki, Hikaru Adachi, Yoshihiro Sato | 2011-03-01 |