TS

Takuya Sugawara

TL Tokyo Electron Limited: 3 patents #77 of 712Top 15%
📍 Yokohama, CA: #49 of 147 inventorsTop 35%
Overall (2011): #34,461 of 364,097Top 10%
3
Patents 2011

Issued Patents 2011

Showing 1–3 of 3 patents

Patent #TitleCo-InventorsDate
8021987 Method of modifying insulating film Yoshihide Tada, Genji Nakamura, Shigenori Ozaki, Toshio Nakanishi, Masaru Sasaki +4 more 2011-09-20
7968472 Film forming method and film forming apparatus Yoshihiro Ishida, Katsushige Harada 2011-06-28
7955922 Manufacturing method of fin-type field effect transistor Hajime NAKABAYASHI, Takashi Kobayashi, Junichi Kitagawa, Yoshitsugu Tanaka 2011-06-07