Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7968470 | Plasma nitriding method, method for manufacturing semiconductor device and plasma processing apparatus | Tadahiro Ohmi, Akinobu Teramoto, Toshio Nakanishi | 2011-06-28 |
| 7960293 | Method for forming insulating film and method for manufacturing semiconductor device | Yoshihiro Sato, Toshio Nakanishi | 2011-06-14 |