Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7938080 | Method for using film formation apparatus | Naotaka Noro, Yamato Tonegawa, Norifumi Kimura | 2011-05-10 |
| 7906168 | Film formation method and apparatus for forming silicon oxide film | Kazuhide Hasebe, Yoshihiro Ishida, Jun Ogawa, Shigeru Nakajima | 2011-03-15 |