Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7964241 | Film formation method and apparatus for semiconductor process | Kazuhide Hasebe, Pao-Hwa Chou, Kota Umezawa, Kentaro Kadonaga | 2011-06-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7964241 | Film formation method and apparatus for semiconductor process | Kazuhide Hasebe, Pao-Hwa Chou, Kota Umezawa, Kentaro Kadonaga | 2011-06-21 |