Issued Patents All Time
Showing 26–50 of 105 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11387139 | Method of manufacturing semiconductor device | Syuji NOZAWA, Sunghil Lee | 2022-07-12 |
| 11373874 | Etching method and apparatus | Nobuhiro Takahashi, Ayano HAGIWARA, Yasuo ASADA | 2022-06-28 |
| 11367633 | Heat treatment apparatus and heat treatment method | — | 2022-06-21 |
| 11342223 | Semiconductor device manufacturing method and substrate processing apparatus | Syuji NOZAWA, Nagisa Sato | 2022-05-24 |
| 11282699 | Substrate processing apparatus | Syuji NOZAWA | 2022-03-22 |
| 11275445 | Input device | Tetsuya TOMARU | 2022-03-15 |
| 11257697 | Temperature monitoring apparatus, heat treatment apparatus, and temperature monitoring method | Yasuaki Kikuchi | 2022-02-22 |
| 11258023 | Resistive change elements using passivating interface gaps and methods for making same | Mark T. Ramsbey, Thomas Rueckes, Syuji NOZAWA, Nagisa Sato | 2022-02-22 |
| 11139313 | Method of manufacturing semiconductor memory | Sunghil Lee, Syuji NOZAWA, Nagisa Sato | 2021-10-05 |
| 11136668 | Film-forming apparatus and film-forming method | Reiji Niino, Yoji IIZUKA | 2021-10-05 |
| 11114319 | Heat treatment apparatus and heat treatment method | Yasuaki Kikuchi, Koji Yoshii, Wataru Nakajima, Norio Baba | 2021-09-07 |
| 11081321 | Substrate processing apparatus | Syuji NOZAWA, Yoji IIZUKA | 2021-08-03 |
| 11079850 | Input apparatus | Tetsuya TOMARU | 2021-08-03 |
| 11069536 | Device manufacturing method | Sunghil Lee, Nagisa Sato, Syuji NOZAWA | 2021-07-20 |
| 11056349 | Method of fabricating semiconductor device, vacuum processing apparatus and substrate processing apparatus | Koichi Yatsuda, Takashi Hayakawa, Hiroshi Okuno, Reiji Niino, Hiroyuki Hashimoto | 2021-07-06 |
| 10960435 | Film forming apparatus, film forming method, and storage medium | Makoto Fujikawa, Reiji Niino, Hiroyuki Hashimoto, Syuji NOZAWA | 2021-03-30 |
| 10957531 | Method of manufacturing semiconductor device | Syuji NOZAWA, Nagisa Sato | 2021-03-23 |
| 10910259 | Semiconductor device manufacturing method | Koichi Yatsuda, Yannick Feurprier, Frederic Lazzarino, Jean-Francois de Marneffe, Khashayar Babaei Gavan | 2021-02-02 |
| 10898863 | Hollow-fiber membrane and hollow-fiber module for cell culture | Makiko Hiraoka, Noriaki Kato | 2021-01-26 |
| 10879060 | Substrate processing apparatus, method of manufacturing semiconductor device, and storage medium | — | 2020-12-29 |
| 10840084 | Method of manufacturing semiconductor device and substrate processing apparatus | — | 2020-11-17 |
| 10790135 | Method of manufacturing semiconductor device | Reiji Niino, Syuji NOZAWA, Makoto Fujikawa | 2020-09-29 |
| 10755971 | Method of manufacturing semiconductor device | Reiji Niino, Hiroyuki Hashimoto, Syuji NOZAWA, Makoto Fujikawa | 2020-08-25 |
| 10748782 | Method of manufacturing semiconductor device | Reiji Niino, Makoto Fujikawa, Yoshihiro Hirota, Rong-Ching Yang, Tomonari Yamamoto | 2020-08-18 |
| 10665470 | Etching method and etching apparatus | Yasuo ASADA, Takehiko Orii, Shinji Irie, Nobuhiro Takahashi, Ayano HAGIWARA | 2020-05-26 |