Issued Patents All Time
Showing 51–75 of 105 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10641553 | Heat treatment apparatus, regulation method of heat treatment apparatus, and program | Yuto Noda, Masayoshi Masunaga, Koji Yoshii | 2020-05-05 |
| 10629448 | Method of manufacturing semiconductor device and vacuum processing apparatus | Reiji Niino, Hiroyuki Hashimoto, Syuji NOZAWA, Makoto Fujikawa | 2020-04-21 |
| 10593556 | Method of fabricating semiconductor device, vacuum processing apparatus and substrate processing apparatus | Koichi Yatsuda, Takashi Hayakawa, Hiroshi Okuno, Reiji Niino, Hiroyuki Hashimoto | 2020-03-17 |
| 10490405 | Semiconductor device manufacturing method, substrate processing apparatus and vacuum processing apparatus | Reiji Niino, Hiroyuki Hashimoto, Syuji NOZAWA, Makoto Fujikawa | 2019-11-26 |
| 10474285 | Controller, input device, input system, display apparatus, and control method | Takahiro Kumada, Minoru Hirashima, Yoshihiro Nakao | 2019-11-12 |
| 10446438 | Method of manufacturing semiconductor device | Reiji Niino, Hiroyuki Hashimoto, Syuji NOZAWA, Makoto Fujikawa | 2019-10-15 |
| 10431479 | Heat treatment apparatus and temperature control method | Kazuteru Obara, Yasuaki Kikuchi, Koji Yoshii | 2019-10-01 |
| 10359881 | Control device, input system, and control method | Hironobu MOROFUJI | 2019-07-23 |
| 10325780 | Method of manufacturing semiconductor device | Koichi Yatsuda, Takashi Hayakawa | 2019-06-18 |
| 9909809 | Heat treatment apparatus and method of controlling the same | Goro Takahashi, Takanori Saito, Wenling Wang, Koji Yoshii | 2018-03-06 |
| 9905442 | Heat treatment apparatus, heat treatment method, and program | Koji Yoshii, Masafumi Shoji | 2018-02-27 |
| 9748122 | Thermal processing apparatus and method of controlling the same | Koji Yoshii, Wenling Wang, Takanori Saito | 2017-08-29 |
| 9708507 | Method for improving chemical resistance of polymerized film, polymerized film forming method, film forming apparatus, and electronic product manufacturing method | Kippei Sugita, Yoshinori Morisada, Makoto Fujikawa | 2017-07-18 |
| 9683128 | Polymerized film forming method | Makoto Fujikawa | 2017-06-20 |
| 9499525 | Dihydrate of benzothiophene compound or of a salt thereof, and process for producing the same | Hiroshi Yamashita, Tetsuya Sato, Takuya MINOWA, Yusuke HOSHIKA, Hidekazu TOYOFUKU +7 more | 2016-11-22 |
| 9422452 | Polymerized film forming method | Yoshinori Morisada | 2016-08-23 |
| 9324591 | Heat treatment apparatus and heat treatment method | Koji Yoshii, Wenling Wang, Takanori Saito | 2016-04-26 |
| 9255736 | Vertical-type heat treatment apparatus | Koji Yoshii, Wenling Wang, Takanori Saito | 2016-02-09 |
| 9249394 | Method for producing epithelial stem cells | Makoto Hijikata, Hassan Hussein Aly | 2016-02-02 |
| 9209057 | Temperature control method, storage medium storing a program therefor, temperature control apparatus, and heat treatment apparatus | Koji Yoshii, Wenling Wang, Takanori Saito | 2015-12-08 |
| 9207665 | Heat treatment apparatus and method of controlling the same | Goro Takahashi, Takahito Kasai, Takanori Saito, Wenling Wang, Koji Yoshii | 2015-12-08 |
| 9162252 | Film forming method | Reiji Niino | 2015-10-20 |
| 8835811 | Thermal processing apparatus and method of controlling the same | Koji Yoshii, Wenling Wang, Takanori Saito | 2014-09-16 |
| 8778815 | Film forming method | Reiji Niino | 2014-07-15 |
| 8575039 | Surface treating method and film depositing method | Hiroyuki Hashimoto | 2013-11-05 |