MS

Masafumi Shoji

TL Tokyo Electron Limited: 2 patents #2,602 of 5,567Top 50%
📍 Iwate, JP: #115 of 263 inventorsTop 45%
Overall (All Time): #1,853,979 of 4,157,543Top 45%
2
Patents All Time

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Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
11424143 Heat insulation structure at lower end of vertical heat treatment apparatus and vertical heat treatment apparatus including heat insulation structure thereof Koji Yoshii, Tatsuya Yamaguchi, Hiroyuki Hayashi, Mitsuhiro Okada, Satoshi Takagi +2 more 2022-08-23
9905442 Heat treatment apparatus, heat treatment method, and program Tatsuya Yamaguchi, Koji Yoshii 2018-02-27