Issued Patents All Time
Showing 76–100 of 172 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8409328 | Substrate transfer device and substrate transfer method | Jun Yamawaku, Junji Oikawa | 2013-04-02 |
| 8404050 | Plasma processing apparatus and method | Tsuyoshi Moriya | 2013-03-26 |
| 8398745 | Substrate processing apparatus and exhaust method therefor | Jun Yamawaku, Junji Oikawa | 2013-03-19 |
| 8382938 | Gate valve cleaning method and substrate processing system | Tsuyoshi Moriya, Keisuke Kondoh, Hiroki Oka | 2013-02-26 |
| 8364422 | Method of presuming interior situation of process chamber and storage medium | — | 2013-01-29 |
| 8337629 | Method for cleaning elements in vacuum chamber and apparatus for processing substrates | Tsuyoshi Moriya, Hiroshi Nagaike | 2012-12-25 |
| 8330454 | Position detection magnet and position detection apparatus | Shigeru Furuki, Satoru Sunada, Kenji Okamoto | 2012-12-11 |
| 8314192 | Interpenetrating polymer network structure and polishing pad, and process for producing the same | Norikazu Tabata, Kazuhiko Hashisaka, Masahiro Sugimura, Takuo Sakamoto, Masaki Ue +1 more | 2012-11-20 |
| 8303834 | Plasma processing apparatus and plasma etching method | Masanobu Honda, Kenji Masuzawa, Manabu Iwata, Manabu Sato, Kazuki Narishige | 2012-11-06 |
| 8298622 | Silica aerogel coating and its production method | Kazuhiro Yamada, Yasuhiro Sakai, Maki Yamada | 2012-10-30 |
| 8276169 | Medium processing device | — | 2012-09-25 |
| 8241514 | Plasma etching method and computer readable storage medium | Masanobu Honda, Manabu Sato | 2012-08-14 |
| 8231800 | Plasma processing apparatus and method | Tsuyoshi Moriya | 2012-07-31 |
| 8231966 | Anti-reflection coating and its production method | Hiroaki Imai, Takanobu Shiokawa, Kazuhiro Yamada, Mineta SUZUKI | 2012-07-31 |
| 8221237 | Game sound output device, game sound control method, information recording medium, and program | — | 2012-07-17 |
| 8206513 | Method for cleaning elements in vacuum chamber and apparatus for processing substrates | Tsuyoshi Moriya, Hiroshi Nagaike | 2012-06-26 |
| 8199404 | Anti-reflection coating, optical member, exchange lens unit and imaging device | Kazuhiro Yamada, Mineta SUZUKI | 2012-06-12 |
| 8172949 | Substrate processing apparatus, program for performing operation and control method thereof, and computer readable storage medium storing the program | Tomoyuki Kudo, Jun Ozawa, Hiroshi Nakamura, Kazunori Kazama, Tsuyoshi Moriya +1 more | 2012-05-08 |
| 8155324 | Voice processor, voice processing method, program, and information recording medium | — | 2012-04-10 |
| 8137473 | Method for cleaning elements in vacuum chamber and apparatus for processing substrates | Tsuyoshi Moriya, Hiroshi Nagaike | 2012-03-20 |
| 8125714 | Anti-reflection coating, optical member, exchange lens unit and imaging device | Kazuhiro Yamada, Mineta SUZUKI | 2012-02-28 |
| 8123328 | Ink tank and ink jet printer incorporating the same | Yukihiro Hanaoka, Koji Yamada, Manabu Yamada | 2012-02-28 |
| 8118936 | Method and apparatus for an improved baffle plate in a plasma processing system | Hidehito Saigusa, Taira Takase, Kouji Mitsuhashi | 2012-02-21 |
| 8117986 | Apparatus for an improved deposition shield in a plasma processing system | Hidehito Saigusa, Taira Takase, Kouji Mitsuhashi | 2012-02-21 |
| 8113757 | Intermediate transfer chamber, substrate processing system, and exhaust method for the intermediate transfer chamber | Tsuyoshi Moriya, Keisuke Kondoh, Hiroki Oka | 2012-02-14 |