Issued Patents All Time
Showing 26–50 of 51 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7289219 | Polarimetric scatterometry methods for critical dimension measurements of periodic structures | Abdurrahman Sezginer, Fred E. Stanke | 2007-10-30 |
| 7248362 | Small-spot spectrometry instrument with reduced polarization and multiple-element depolarizer therefor | Kenneth C. Johnson, Fred E. Stanke | 2007-07-24 |
| 7224450 | Method and apparatus for position-dependent optical metrology calibration | Abdurrahman Sezginer, Kenneth C. Johnson, Holger Tuitje | 2007-05-29 |
| 7215419 | Method and apparatus for position-dependent optical metrology calibration | Abdurrahman Sezginer, Kenneth C. Johnson, Holger Tuitje | 2007-05-08 |
| 7158229 | Small-spot spectrometry instrument with reduced polarization and multiple-element depolarizer therefor | Kenneth C. Johnson, Fred E. Stanke | 2007-01-02 |
| 7145654 | Method and apparatus to reduce spotsize in an optical metrology instrument | — | 2006-12-05 |
| 7099081 | Small-spot spectrometry instrument with reduced polarization and multiple-element depolarizer therefor | Kenneth C. Johnson, Fred E. Stanke | 2006-08-29 |
| 7095496 | Method and apparatus for position-dependent optical metrology calibration | Abdurrahman Sezginer, Kenneth C. Johnson, Holger Tuitje | 2006-08-22 |
| 7081957 | Aperture to reduce sensitivity to sample tilt in small spotsize reflectometers | — | 2006-07-25 |
| 6919958 | Wafer metrology apparatus and method | Fred E. Stanke, Clinton Carlisle, Hung Pham, Edric Tong, Douglas E. Ruth +3 more | 2005-07-19 |
| 6909507 | Polarimetric scatterometry methods for critical dimension measurements of periodic structures | Abdurrahman Sezginer, Fred E. Stanke | 2005-06-21 |
| 6870617 | Accurate small-spot spectrometry systems and methods | Abdurrahman Sezginer, Fred E. Stanke, Rodney Smedt | 2005-03-22 |
| 6778273 | Polarimetric scatterometer for critical dimension measurements of periodic structures | Abdurrahman Sezginer, Fred E. Stanke | 2004-08-17 |
| 6753961 | Spectroscopic ellipsometer without rotating components | Kenneth C. Johnson, Fred E. Stanke, Abdurrahman Sezginer | 2004-06-22 |
| 6738136 | Accurate small-spot spectrometry instrument | Abdurrahman Sezginer, Fred E. Stanke, Rodney Smedt | 2004-05-18 |
| 6677602 | Notch and flat sensor for wafer alignment | — | 2004-01-13 |
| 6667805 | Small-spot spectrometry instrument with reduced polarization | Kenneth C. Johnson, Fred E. Stanke | 2003-12-23 |
| 6611330 | System for measuring polarimetric spectrum and other properties of a sample | Shing Lee, Haiming Wang, Mehrdad Nikoonahad | 2003-08-26 |
| 6583877 | Spectroscopic measurement system using an off-axis spherical mirror and refractive elements | — | 2003-06-24 |
| 6572456 | Bathless wafer measurement apparatus and method | Michael Weber-Grabau, Ivelin A. Anguelov, Edric Tong, Fred E. Stanke, Badru D. Hyatt | 2003-06-03 |
| 6323946 | Spectroscopic measurement system using curved mirror | — | 2001-11-27 |
| 6184984 | System for measuring polarimetric spectrum and other properties of a sample | Shing Lee, Haiming Wang, Mehrdad Nikoonahad | 2001-02-06 |
| 5917594 | Spectroscopic measurement system using an off-axis spherical mirror and refractive elements | — | 1999-06-29 |
| 5859424 | Apodizing filter system useful for reducing spot size in optical measurements and other applications | Kenneth C. Johnson, Joseph R. Carter | 1999-01-12 |
| 5747813 | Broadband microspectro-reflectometer | Chester L. Mallory, Hung Pham, Paul Rasmussen | 1998-05-05 |