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Nickel silicide including indium and a method of manufacture therefor |
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Nickel alloy silicide including indium and a method of manufacture therefor |
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— |
1994-05-31 |
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Selective etching of tungsten by remote and in situ plasma generation |
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1989-10-17 |
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Method for etching tungsten |
Rhett B. Jucha, Cecil J. Davis |
1989-09-05 |
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Method for etching tungsten |
Rhett B. Jucha, Cecil J. Davis, Duane E. Carter, John I. Jones |
1989-07-18 |