Issued Patents All Time
Showing 1–25 of 57 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424419 | Ion beam etching chamber with etching by-product redistributor | Te-Hsien Hsieh | 2025-09-23 |
| 12391545 | Semiconductor device and method for fabricating the same | Chun-Wen Cheng, Yi-Chuan Teng, Cheng-Yu Hsieh, Shih-Chang Liu, Shih-Wei Lin | 2025-08-19 |
| 12362154 | Ion beam etching chamber with etching by-product redistributor | Te-Hsien Hsieh | 2025-07-15 |
| 12358785 | Comb electrode release process for MEMS structure | Ting-Jung Chen | 2025-07-15 |
| 12345920 | Semiconductor device and method of making | Yi-Chen Chen, Shih-Wei Lin | 2025-07-01 |
| 12272585 | Wafer chuck structure with holes in upper surface to improve temperature uniformity | Ting-Jung Chen, Shih-Wei Lin | 2025-04-08 |
| 12136556 | Sonar sensor in processing chamber | — | 2024-11-05 |
| 12094989 | Dielectric sidewall structure for quality improvement in Ge and SiGe devices | Chih-Ming Chen, Ming Chyi Liu, Po-Chun Liu | 2024-09-17 |
| 12027350 | Process and related device for removing by-product on semiconductor processing chamber sidewalls | Jing Liao, Chang-Ming Wu | 2024-07-02 |
| 11996308 | Method for mapping wafers in a wafer carrier | — | 2024-05-28 |
| 11921325 | Semiconductor device and method of making | Yi-Chen Chen, Shih-Wei Lin | 2024-03-05 |
| 11749763 | Dielectric sidewall structure for quality improvement in Ge and SiGe devices | Chih-Ming Chen, Ming Chyi Liu, Po-Chun Liu | 2023-09-05 |
| 11710622 | Process and related device for removing by-product on semiconductor processing chamber sidewalls | Jing Liao, Chang-Ming Wu | 2023-07-25 |
| 11675129 | Semiconductor device and method of making | Yi-Chen Chen, Shih-Wei Lin | 2023-06-13 |
| 11661337 | Comb electrode release process for MEMS structure | Ting-Jung Chen | 2023-05-30 |
| 11542153 | Segmented pedestal for mounting device on chip | Yuan-Chih Hsieh | 2023-01-03 |
| 11508562 | Low contamination chamber for surface activation | Ping-Yin Liu, Xin-Hua Huang, Lan-Lin Chao | 2022-11-22 |
| 11434129 | Semiconductor structure and method for fabricating the same | Chun-Wen Cheng, Yi-Chuan Teng, Cheng-Yu Hsieh, Shih-Chang Liu, Shih-Wei Lin | 2022-09-06 |
| 11261083 | Fence structure to prevent stiction in a MEMS motion sensor | Chang-Ming Wu | 2022-03-01 |
| 11239060 | Ion beam etching chamber with etching by-product redistributor | Te-Hsien Hsieh | 2022-02-01 |
| 11183391 | Method for real time monitoring semiconductor fabrication process | — | 2021-11-23 |
| 11167982 | Semiconductor arrangement and formation thereof | Chung-Yen Chou, Chia-Shiung Tsai, Ru-Liang Lee | 2021-11-09 |
| 11084715 | Segmented pedestal for mounting device on chip | Yuan-Chih Hsieh | 2021-08-10 |
| 10896985 | Dielectric sidewall structure for quality improvement in GE and SIGE devices | Chih-Ming Chen, Ming Chyi Liu, Po-Chun Liu | 2021-01-19 |
| 10875764 | High efficiency getter design in vacuum MEMS device | Ting-Jung Chen | 2020-12-29 |