Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12358785 | Comb electrode release process for MEMS structure | Lee-Chuan Tseng | 2025-07-15 |
| 12272585 | Wafer chuck structure with holes in upper surface to improve temperature uniformity | Shih-Wei Lin, Lee-Chuan Tseng | 2025-04-08 |
| 12238478 | Top notch slit profile for MEMS device | — | 2025-02-25 |
| 12213383 | Fully-wet via patterning method in piezoelectric sensor | Ming Chyi Liu | 2025-01-28 |
| 12180064 | Curved cantilever design to reduce stress in MEMS actuator | — | 2024-12-31 |
| 12133467 | Microelectromechanical system with piezoelectric film and manufacturing method thereof | — | 2024-10-29 |
| 12043537 | Method of manufacturing a microelectromechanical systems (MEMS) device | Shih-Wei Lin, Chang-Ming Wu | 2024-07-23 |
| 12006208 | Micro-electromechanical system device including a precision proof mass element and methods for forming the same | Shih-Wei Lin | 2024-06-11 |
| 11932531 | Curved cantilever design to reduce stress in MEMS actuator | — | 2024-03-19 |
| 11693295 | Auto-focusing device and method of fabricating the same | Shih-Wei Lin | 2023-07-04 |
| 11661337 | Comb electrode release process for MEMS structure | Lee-Chuan Tseng | 2023-05-30 |
| 11634320 | Micro-electromechanical system device including a precision proof mass element and methods for forming the same | Shih-Wei Lin | 2023-04-25 |
| 11557710 | Fully-wet via patterning method in piezoelectric sensor | Ming Chyi Liu | 2023-01-17 |
| 11482663 | Microelectromechanical system with piezoelectric film and manufacturing method thereof | — | 2022-10-25 |
| 11312615 | Method to form a rough crystalline surface | — | 2022-04-26 |
| 11203522 | Sidewall stopper for MEMS device | Shih-Wei Lin, Chang-Ming Wu | 2021-12-21 |
| 10875764 | High efficiency getter design in vacuum MEMS device | Lee-Chuan Tseng | 2020-12-29 |
| 10766763 | Sidewall stopper for MEMS device | Shih-Wei Lin, Chang-Ming Wu | 2020-09-08 |
| 10526199 | High efficiency getter design in vacuum MEMS device | Lee-Chuan Tseng | 2020-01-07 |
| 8686191 | Environmentally-friendly new oxidation process for converting aryl-1,2-diol to ketone | Yu-Fen Wang | 2014-04-01 |
| 8354512 | Ligand and metal complex | Yun-Ming Wang | 2013-01-15 |
| 8344102 | Nanoparticle and magnetic resonance imaging contrast agent | Yun-Ming Wang | 2013-01-01 |
| 7598335 | Folate-receptor-targeting iron oxide nanoparticles coated with poly(ethylene glycol) | Yun-Ming Wang, Kuei-Tang Lin, Gin-Chung Liu | 2009-10-06 |